期刊
NANOTECHNOLOGY
卷 23, 期 8, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/23/8/085301
关键词
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资金
- National Natural Science Foundation of China [NSFC 50902004, 11023003, 10974003]
- China's Ministry of Science and Technology [2009CB623703, 2011CB707600]
- International Science & Technology Cooperation Program of China Sino Swiss Science and Technology Cooperation Program [2010DFA01810]
- EU [247641]
A poly(methyl methacrylate) assisted dry transfer method was developed to transfer graphene microflake onto a suspended SiN chip in an effective and efficient way for further graphene nanopore drilling for DNA analysis. Graphene microflakes can be patterned by e-beam lithography to a designed shape and size on a large scale of a few thousands simultaneously. Subsequently, individual graphene microflakes can be picked up and transferred to a target hole on a suspended SiN membrane with 1 mu m precision via a site-specific transfer-printing method. Nanopores with different diameters from 3 to 20 nm were drilled on the as-transferred graphene membrane in a transmission electron microscope. This method offers a fast and controllable way to fabricate graphene nanopores for DNA analyses.
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