期刊
NANOTECHNOLOGY
卷 23, 期 34, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/23/34/344016
关键词
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资金
- Basic Science Research Program [2011K000615, 2011-0017587, 2011-0006268]
- Global Research Laboratory (GRL) Program [2011-0021972]
- Priority Research Centers Program [2011-0018395]
- Center for Advanced Soft Electronics under the Global Frontier Research Program of the Ministry of Education, Science and Technology, Korea [2011-0031627]
- National Research Foundation of Korea [2009-0093248, 2009-0093247, 2011-0017587, 2011-0021972, 2010-50171] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
We demonstrate low-temperature growth and direct transfer of graphene-graphitic carbon films (G-GC) onto plastic substrates without the use of supporting materials. In this approach, G-GC films were synthesized on copper layers by using inductively coupled plasma enhanced chemical vapor deposition, enabling the growth of few-layer graphene (G) on top of Cu and the additional growth of graphitic carbon (GC) films above the graphene layer at temperatures as low as 300 degrees C. The patterned G-GC films are not easily damaged or detached from the polymer substrates during the wet etching and transfer process because of the van der Waals forces and pi-pi interactions between the films and the substrates. Raman spectroscopy reveals the two-dimensional hexagonal lattice of carbon atoms and the crystallinity of the G-GC films. The optical transparency and sheet resistance of the G-GC films are controlled by modulating the film thickness. Strain sensors are successfully fabricated on plastic substrates, and their resistance modulation at different strains is investigated.
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