期刊
NANOTECHNOLOGY
卷 23, 期 49, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/23/49/495302
关键词
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资金
- DARPA TBN
- NSF Nano-CEMMS
- Department of Energy Office of Science Graduate Fellowship Program (DOE SCGF)
- American Recovery and Reinvestment Act
- ORISE-ORAU [DE-AC05-06OR23100]
- US Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-AC02-06CH11357]
- NSF IGERT [DGE-0221664]
- NSF CMMI [CMMI-0826076, IIP-0823002]
We report a wear-resistant ultrananocrystalline (UNCD) diamond tip integrated onto a heated atomic force microscope (AFM) cantilever and UNCD tips integrated into arrays of heated AFM cantilevers. The UNCD tips are batch-fabricated and have apex radii of approximately 10 nm and heights up to 7 mu m. The solid-state heater can reach temperatures above 600 degrees C and is also a resistive temperature sensor. The tips were shown to be wear resistant throughout 1.2 m of scanning on a single-crystal silicon grating at a force of 200 nN and a speed of 10 mu m s(-1). Under the same conditions, a silicon tip was completely blunted. We demonstrate the use of these heated cantilevers for thermal imaging in both contact mode and intermittent contact mode, with a vertical imaging resolution of 1.9 nm. The potential application to nanolithography was also demonstrated, as the tip wrote hundreds of polyethylene nanostructures.
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