期刊
NANOTECHNOLOGY
卷 21, 期 38, 页码 -出版社
IOP Publishing Ltd
DOI: 10.1088/0957-4484/21/38/385303
关键词
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资金
- Singapore-MIT Alliance
- National University of Singapore
A method to create an array of sub-5 nm nanogaps with self-aligned holes in a protective polymer overlayer is presented. The parallel formation of the nanogaps, intended for electrical sensing of biomolecules in an aqueous environment, is achieved by electromigration using a simple voltage ramp across parallel-connected electrode patterns with individual constrictions. It was observed that the nanogap always formed on the cathode side of a bowtie electrode, with corresponding hillocks on the anode side, with the distance of the gap/hillock formation from the constriction depending on the ambient temperature. This technique provides a practical means to fabricate a series of polymer-protected nanogaps with considerably higher efficiency than afforded by the normally slow serial process of electromigration.
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