4.6 Article

Using direct nanoimprinting of ferroelectric films to prepare devices exhibiting bi-directionally tunable surface plasmon resonances

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NANOTECHNOLOGY
卷 19, 期 43, 页码 -

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IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/19/43/435304

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  1. National Science Council, Taiwan, Republic of China [NSC-95-2221-E-002-324-MY2, NSC-96-2623-7-002-005-ET]

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In this paper, we describe an imprint method for the fabrication of bi-directionally tunable surface plasmon resonance (SPR) filters. A periodic metal/ferroelectric film stack exhibiting SPR phenomena was directly imprinted using a sharp mold without the need for a polymer-based resist. Both the refractive index of the surrounding lead zirconate titanate (PZT) films and the period of the textured PZT/metal/PZT structure were dependent upon both the absolute value and sign of the applied potential. The SPR wavelength of the PZT/gold/PZT-based tunable filter varied over a range of greater than 100 nm when applying potentials ranging from 0 to -15 V. This imprinting method has great potential for use in the fabrication of tunable optical filters without the need for complicated processes or specific materials.

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