期刊
NANOTECHNOLOGY
卷 20, 期 1, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/20/1/015501
关键词
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资金
- Swiss National Science Foundation (SNSF)
- Japan Society for the Promotion of Science (JSPS)
- Canon Foundation in Europe
- JGC-S Scholarship Foundation
- Institute for Materials Research (IMR), Japan
- World Premier International Research Center (WPI) Initiative on Materials Nanoarchitronics, MEXT, Japan
The performance of microfabricated piezoresistive cantilever array sensors has been evaluated using various vapors of volatile organic compounds including alkanes with different chain length from 5 (n-pentane) to 14 (n-tetradecane). We demonstrate that piezoresistive microcantilever array sensors have the selectivity of discriminating individual alkanes in a homologous series as well as common volatile organic compounds according to principal component analysis. We developed a new method to evaluate the sensitivity, taking advantage of the low vapor pressures of alkanes with longer chains, such as n-dodecane, n-tridecane and n-tetradecane, under saturated vapor conditions. This method reveals sub-ppm sensitivity and the cantilever response is found to follow the mass of evaporated analytes as calculated using a quantitative model based on the Langmuir evaporation model.
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