Cellular iron nanocrystalline film was fabricated on carbon substrate by electron beam chemical vapor deposition (EB-CVD). The film was made up of single alpha-iron cubes with {100} facets ranging from several tens to 200 nm. The thickness and distribution of the film could be controlled by adjusting the irradiation position and duration of the electron beam. The integration of well-faceted nanocrystals enables the film to have a high ratio of free surfaces, which are essential for applications in chemical catalysis and energy absorption. The application of this film as a substrate for further nanofabrication was demonstrated.
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