期刊
NANOTECHNOLOGY
卷 20, 期 2, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/20/2/025701
关键词
-
资金
- Frontier Materials and Micro/Nano Science and Technology Center
- National Cheng Kung University, Taiwan [D97- 2700]
Indentation forces, including constant rate and oscillating mode, were applied to SiO2/Si and diamond-like carbon ( DLC)/Si specimens. A two-stage behavior was exhibited in the force-depth results after delamination occurred. When the depth was smaller than the threshold value, a linear load-depth relationship was exhibited because the debonded film was suspended over the substrate. Membrane theory was applied to analyze the deflection of the suspended film, and thus the in-plane stress exhibited in the debonded film was evaluated. Through the proposed method, the strain energy release rate of the interface can be directly evaluated by analyzing the force-depth data of the indentation tests.
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