4.3 Article

Nano-Floating Gate Memory Devices Composed of ZnO Thin-Film Transistors on Flexible Plastics

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NANOSCALE RESEARCH LETTERS
卷 6, 期 -, 页码 -

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SPRINGER
DOI: 10.1007/s11671-010-9789-5

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资金

  1. MKE/KEIT [10030559]
  2. Industry and Energy, the Nano RD Program [M10703000980-08M0300-98010]
  3. World Class University (WCU) [R32-2008-000-10082-0]
  4. Ministry of Education, Science and Technology (Korea Science and Engineering Foundation)

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Nano-floating gate memory devices were fabricated on a flexible plastic substrate by a low-temperature fabrication process. The memory characteristics of ZnO-based thin-film transistors with Al nanoparticles embedded in the gate oxides were investigated in this study. Their electron mobility was found to be 0.18 cm(2)/V.s and their on/off ratio was in the range of 10(4)-10(5). The threshold voltages of the programmed and erased states were negligibly changed up to 10(3) cycles. The flexibility, memory properties, and low-temperature fabrication of the nano-floating gate memory devices described herein suggest that they have potential applications for future flexible integrated electronics.

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