期刊
NANOSCALE RESEARCH LETTERS
卷 4, 期 7, 页码 680-683出版社
SPRINGEROPEN
DOI: 10.1007/s11671-009-9297-7
关键词
Sub-wavelength Structure; Solar cell; SWS fabrication; Reflectance; Anti-reflective coatings
资金
- Taiwan National Science Council (NSC) [NSC-97-2221-E009-001-PAE]
- Motech Industries Inc. (MOTECH), Tainan, Taiwan
- Department, Industrial Technology Research Institute, Hsinchu, Taiwan
We have developed a simple and scalable approach for fabricating sub-wavelength structures (SWS) on silicon nitride by means of self-assembled nickel nanoparticle masks and inductively coupled plasma (ICP) ion etching. Silicon nitride SWS surfaces with diameter of 160-200 nm and a height of 140-150 nm were obtained. A low reflectivity below 1% was observed over wavelength from 590 to 680 nm. Using the measured reflectivity data in PC1D, the solar cell characteristics has been compared for single layer anti-reflection (SLAR) coatings and SWS and a 0.8% improvement in efficiency has been seen.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据