4.8 Article

Scalable fabrication of high-performance and flexible graphene strain sensors

期刊

NANOSCALE
卷 6, 期 2, 页码 699-705

出版社

ROYAL SOC CHEMISTRY
DOI: 10.1039/c3nr04521h

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资金

  1. National Natural Science Foundation of China [61025021, 60936002, 51072089, 61020106006]
  2. National Key Project of Science and Technology [2011ZX02403-002]
  3. Special Fund for Agro-scientific Research in the Public Interest [201303107]
  4. Ministry of Education Scholarship of China

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Graphene strain sensors have promising prospects of applications in detecting human motion. However, the shortage of graphene growth and patterning techniques has become a challenging issue hindering the application of graphene strain sensors. Therefore, we propose wafer-scale flexible strain sensors with high-performance, which can be fabricated in one-step laser scribing. The graphene films could be obtained by directly reducing graphene oxide film in a Light-Scribe DVD burner. The gauge factor (GF) of the graphene strain sensor (10 mm x 10 mm square) is 0.11. In order to enhance the GF further, graphene micro-ribbons (20 mu m width, 0.6 mm long) has been used as strain sensors, of which the GF is up to 9.49. The devices may conform to various application requirements, such as high GF for low-strain applications and low GF for high deformation applications. The work indicates that laser scribed flexible graphene strain sensors could be widely used in medical-sensing, bio-sensing, artificial skin and many other areas.

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