期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 221, 期 -, 页码 1195-1201出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2015.07.084
关键词
ZnO nanorod arrays; Wet chemical route; NO2 gas sensor; Sensitivity
资金
- Science and Engineering Research Board (SERB), Department of Science and Technology (DST), New Delhi, India
- Human Resources Development program of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant - Korea government Ministry of Trade, Industry and Energy [20124010203180]
- Synthesis and characterization of nanostructred metal oxides for gas sensor applications [SR/FTP/PS-083/2012]
Metal oxide gas sensors are promising devices that are widely used to detect various gases at moderate temperatures. In this study, nitrogen di-oxide (NO2) sensors were fabricated using zinc oxide (ZnO) nanorod arrays. ZnO nanorod arrays (ZNAs) with various rod lengths were deposited using a wet chemical route with zinc acetate as a precursor. The structural and surface morphological properties of the ZNAs were investigated using X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM), respectively. The XRD patterns showed ZNAs with wurtzite crystal structures that were preferentially oriented in the (0 0 2) direction. The intensity of the (0 0 2) plane was found to vary with the length of the nanorods. FESEM micrographs show that the ZNAs had a vertical alignment perpendicular to the substrate, and the diameter and length of the nanorods increased as the nanorod deposition time was increased. The gas sensing performance was studied as a function of the nanorod length, operating temperature, time and gas concentration. The length and inter-rod space was observed to play a crucial role in determining the gas sensing performance of the devices. ZNA gas sensors deposited for 9 h and operating at a temperature of 175 degrees C were able to detect NO2 at a concentration of 100 ppm with a high sensitivity of 3100%. (C) 2015 Elsevier B.V. All rights reserved.
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