期刊
NANO RESEARCH
卷 5, 期 3, 页码 190-198出版社
TSINGHUA UNIV PRESS
DOI: 10.1007/s12274-012-0199-0
关键词
Nanotube; cell injection; nanowire; gallium phosphide; reactive ion etching; wet etching; cell
类别
资金
- Nanometer Structure Consortium at Lund University (nmC@LU)
- Swedish Foundation for Strategic Research (SSF)
- Swedish Research Council (VR) [2007-584, 2008-6584, 2004-6793]
- Crafoord Foundation [2005 1123]
- Knut and Alice Wallenberg Foundation
We describe the fabrication of arrays of oxide nanotubes using a combination of bottom up and top down nanofabrication. The nanotubes are made from epitaxially grown semiconductor nanowires that are covered with an oxide layer using atomic layer deposition. The tips of the oxide-covered nanowires are removed by argon sputtering and the exposed semiconductor core is then selectively etched, leaving a hollow oxide tube. We show that it is possible to create fluidic connections to the nanotubes by a combination of electron beam lithography to precisely define the nanotube positions and controlled wet under-etching. DNA transport is demonstrated in the microchannel. Cells were successfully cultured on the nanotube arrays, demonstrating compatibility with cell-biological applications. Our device opens up the possibility of injecting molecules into cells with both spatial and temporal control.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据