期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 217, 期 -, 页码 146-150出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2014.10.034
关键词
Gas sensor; In2O3; Micro-heater; Surface micromachining; Alcohol
资金
- Ministry of Trade, Industry and Energy 'Technology development project
- Sensitivity touch platform development and new industrialization support program through the Ministry of Trade, Industry Energy (MOTIE)
- Korea Institute for Advancement of Technology (KIAT)
- ETRI R&D Program (The title of research project : Silicide/Silicon hetero-junction structure for thermoelectric device) - Government of Korea [14ZB1300]
- National Research Council of Science & Technology (NST), Republic of Korea [14ZB1300] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Micro alcohol gas sensor was fabricated based on micro-heater by using CMOS compatible MEMS process and ink jetting technique. The paste for ink jetting deposition was based on semiconducting In2O3 powder. In the structure of micro-heater, two semi-circled Pt heaters, where some etching holes including etching hole in the center of the micor-heater exist, are connected to the spreader for thermal uniformity and reduction of the Si etching time. Based on the above design, low power consumption alcohol gas sensor was fabricated, which showed substantial sensitivity down to 0.05 ppm alcohol at low power consumption (24 mW). (C) 2014 Elsevier B.V. All rights reserved.
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