期刊
NANO LETTERS
卷 14, 期 1, 页码 231-238出版社
AMER CHEMICAL SOC
DOI: 10.1021/nl403817z
关键词
Midinfrared; opto-nanofluidics; on-chip; sensors
类别
资金
- Defense Threat Reduction Agency [HDTRA1-10-1-0101, HDTRA1-13-1-0001]
- U.S. Department of Energy [DE-FG02-00ER45852]
A mid-infrared (mid-IR) spectrometer for label-free on-chip chemical sensing was developed using an engineered nanofluidic channel consisting of a Si-liquid-Si slot-structure. Utilizing the large refractive index contrast (Delta n similar to 2) between the liquid core of the waveguide and the Si cladding, a broadband mid-IR lightwave can be efficiently guided and confined within a nanofluidic capillary (<= 100 nm wide). The optical-field enhancement, together with the direct interaction between the probe light and the analyte, increased the sensitivity for chemical detection by 50 times when compared to evanescent-wave sensing. This spectrometer distinguished several common organic liquids (e.g., n-bromohexane, toluene, isopropanol) accurately and could determine the ratio of chemical species (e.g., acetonitrile and ethanol) at low concentration (<5 mu L/mL) in a mixture through spectral scanning over their characteristic absorption peaks in the mid-IR regime. The combination of CMOS-compatible planar mid-IR microphotonics, and a high-throughput nanofluidic sensor system, provides a unique platform for chemical detection.
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