期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 206, 期 -, 页码 399-406出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2014.09.057
关键词
Catalytic gas sensing; Microheaters; Graphene aerogel; Platinum nanoparticles; Low power hydrogen sensing
资金
- National Science Foundation under the Center of Integrated Nanomechanical Systems [EEC-0832819]
- NSF Innovation Corps program [1357682]
- Office of Energy Research, Office of Basic Energy Sciences, Materials Sciences and Engineering Division, of the U.S. Department of Energy [DE-AC02-05CH11231]
- UC Lab Fees Research Program [12-LR-235323]
- Lawrence Livermore National Laboratory under the auspices of the U.S. Department of Energy, through LDRD award [DE-AC52-07NA27344, 13-LW-099]
- National Science Foundation Graduate Research Fellowship [DGE 1106400]
- Directorate For Engineering [1357682, 1444950] Funding Source: National Science Foundation
- Div Of Industrial Innovation & Partnersh [1444950, 1357682] Funding Source: National Science Foundation
Low power catalytic hydrogen sensors are fabricated by functionalizing low power polysilicon microheaters with platinum nanoparticle catalyst loaded in a high surface area graphene aerogel support. Fabrication and characterization of the polysilicon microheaters are described. The platinum nanoparticle-loaded graphene aerogel is characterized by transmission electron microscopy, scanning electron microscopy, and energy dispersive X-ray spectroscopy. The catalytic hydrogen sensors consume as little as 2.2 mW of power, have sensitivity of 1.6%/10,000 ppm hydrogen, a t(90) response and recovery time of 0.97 s and 0.72 s, respectively, a lower detection limit of approximately 65 ppm, and negligible cross sensitivity to methane, n-pentane, and diethylether. (C) 2014 Elsevier B.V. All rights reserved.
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