期刊
NANO LETTERS
卷 12, 期 10, 页码 5074-5081出版社
AMER CHEMICAL SOC
DOI: 10.1021/nl301551a
关键词
Graphene; terahertz; micro four-point probe; metrology; imaging electrical characterization; noninvasive characterization; spectroscopy
类别
资金
- Danish Council for Independent Research, Technology and Production Sciences (FTP),
- National Sciences and Engineering Council (NSERC)
- Carlsberg Foundation
- Danish National Research Foundation
We demonstrate a combination of micro four-point probe (M4PP) and non-contact terahertz time-domain spectroscopy (THz-TDS) measurements for centimeter scale quantitative mapping of the sheet conductance of large area chemical vapor deposited graphene films. Dual configuration M4PP measurements, demonstrated on graphene for the first time, provide valuable statistical insight into the influence of microscale defects on the conductance, while THz-TDS has potential as a fast, non-contact metrology method for mapping of the spatially averaged nanoscopic conductance on wafer-scale graphene with scan times of less than a minute for a 4-in. wafer. The combination of M4PP and THz-TDS conductance measurements, supported by micro Raman spectroscopy and optical imaging, reveals that the film is electrically continuous on the nanoscopic scale with microscopic defects likely originating from the transfer process, dominating the microscale conductance of the investigated graphene film.
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