期刊
NANO LETTERS
卷 13, 期 1, 页码 213-218出版社
AMER CHEMICAL SOC
DOI: 10.1021/nl303887b
关键词
Rolled-up electronic device; flexible metal-oxide field effect transistor; indium gallium arsenide; microfluidics; solvent sensing
类别
资金
- SMWK
- SAB
- Multidisciplinary University Research Initiative (MURI)
- U.S. Air Force Office of Scientific Research (AFOSR) [FA9550-09-1-0550]
We fabricate inorganic thin film transistors with bending radii of less than 5 mu m maintaining their high electronic performance with on-off ratios of more than 10(5) and subthreshold swings of 160 mV/dec. The fabrication technology relies on the roll-up of highly strained semiconducting nanomembranes, which compacts planar transistors into three-dimensional tubular architectures opening intriguing potential for microfluidic applications. Our technique probes the ultimate limit for the bending radius of high performance thin film transistors.
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