期刊
NANO LETTERS
卷 12, 期 3, 页码 1269-1274出版社
AMER CHEMICAL SOC
DOI: 10.1021/nl2037479
关键词
NEMS arrays; gas chromatography; gas detectors; mass sensing
类别
资金
- DARPA/MTO-MGA [NBCH1050001]
- Institut Carnot via the Carnot-NEMS project
We have developed arrays of nanomechanical systems (NEMS) by large-scale integration, comprising thousands of individual nanoresonators with densities of up to 6 million NEMS per square centimeter. The individual NEMS devices are electrically coupled using a combined series-parallel configuration that is extremely robust with respect to lithographical defects and mechanical or electrostatic-discharge damage. Given the large number of connected nanoresonators, the arrays are able to handle extremely high input powers (>1 W per array, corresponding to <1 mW per nanoresonator) without excessive heating or deterioration of resonance response. We demonstrate the utility of integrated NEMS arrays as high-performance chemical vapor sensors, detecting a part-per-billion concentration of a chemical warfare sirnulant within only a 2 s exposure period.
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