期刊
NANO LETTERS
卷 11, 期 10, 页码 4304-4308出版社
AMER CHEMICAL SOC
DOI: 10.1021/nl202326e
关键词
Diamond; single-crystal; nanomechanical; resonator; dissipation
类别
资金
- Office of Naval Research
- U.S. Naval Research Laboratory
We present the first nanomechanical resonators microfabricated in single-crystal diamond. Shell-type resonators only 70 nm thick, the thinnest single crystal diamond structures produced to date, demonstrate a high-quality factor (Q approximate to 1000 at room temperature, Q approximate to 20 000 at 10 K) at radio frequencies (50-600 MHz). Quality factor dependence on temperature and frequency suggests an extrinsic origin to the dominant dissipation mechanism and methods to further enhance resonator performance.
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