4.8 Article

Fabrication of Diverse Metallic Nanowire Arrays Based on Block Copolymer Self-Assembly

期刊

NANO LETTERS
卷 10, 期 9, 页码 3722-3726

出版社

AMER CHEMICAL SOC
DOI: 10.1021/nl1023518

关键词

Block copolymer lithography; metallic nanowires; magnetic nanowires; metal gratings; polystyrene-polydimethylsiloxane

资金

  1. Semiconductor Research Corporation
  2. Office of Naval Research
  3. National Research Foundation [KRF-2008-314-D00153]
  4. BK21 program
  5. National Research Foundation of Korea [2008-314-D00153, 314-2008-1-D00153] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

向作者/读者索取更多资源

Metallic nanowires are useful for fabricating highly integrated nanoscale electrical magnetic, and photonic devices. However, conventional methods based on bottom up growth techniques are subject to concerns such as broad distributions in their dimension as well and difficulties in precise placement of the nanowires. These issues can be solved by the guided self assembly of block copolymer thin films that can produce periodic arrays of monodisperse nanoscale features With excellent positional accuracy. Here, we report transfer of high-quality linear block copolymer patterns into various metals, Ti, W, Pt, Co, Ni, Ta, Au, and Al, to fabricate highly ordered nanowire arrays with widths down to 9 nm. This novel patterning process does not require specific film deposition techniques or etch-chemistries. We also describe their structural, magnetic; and electrical properties.

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