期刊
NANO LETTERS
卷 10, 期 12, 页码 4869-4873出版社
AMER CHEMICAL SOC
DOI: 10.1021/nl102713c
关键词
Graphene; nanoelectro mechanical systems; nanomechanics; NEMS; chemical vapor deposition; carbon
类别
资金
- NSF through the Cornell Center For Materials Research (CCMR)
- MARCO Focused Research Center on Materials Structures and Devices
- AFOSR MURI
- AFOSR PECASE
- NSF
- Direct For Mathematical & Physical Scien
- Division Of Chemistry [0847926] Funding Source: National Science Foundation
- Directorate For Engineering
- Div Of Engineering Education and Centers [0851951] Funding Source: National Science Foundation
- Division Of Materials Research
- Direct For Mathematical & Physical Scien [0908634] Funding Source: National Science Foundation
We fabricated large arrays of suspended single layer graphene membrane resonators using chemical vapor deposition (CVD) growth followed by patterning and transfer We measure the resonators using both optical and electrical actuation and detection techniques We find that the resonators can be modeled as flat membranes under tension and that clamping the membranes on all sides improves agreement with our model and reduces the variation in frequency between identical resonators The resonance frequency is tunable with both electrostatic gate voltage and temperature and quality factors improve dramatically with cooling reaching values up to 9000 at 10 K These measurements show that it is possible to produce large arrays of CVD grown graphene resonators with reproducible properties and the same excellent electrical and mechanical properties previously reported for exfoliated graphene
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