期刊
NANO LETTERS
卷 10, 期 10, 页码 3927-3932出版社
AMER CHEMICAL SOC
DOI: 10.1021/nl101669u
关键词
Strain-induced self-rolling; semiconductor micro; and nanotubes; GaAs MOCVD; finite element method
类别
资金
- National Science Foundation (NSF) [ECCS 0747178, CMMI 074902, 0504751, CMMI 0952565]
Semiconductor micro- and nanotubes can be formed by strain-induced self-rolling of membranes The effect of geometrical dimensions on the self-rolling behavior of epitaxial mismatch-strained InxGa1-xAs GaAs membranes are systematically studied both experimentally and theoretically using the finite element method The final rolling direction depends on the length and width of the membrane as well as the diameter of the rolled-up tube The energetics of the final states, the history of rolling process, and the kinetic control of the etching anisotropy ultimately determine the rolling behavior Results reported here provide critical information for precise positioning and uniform large area assembly of semiconducting micro- and nanotubes for applications in photonics, microelectromechanical systems, etc
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