Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion

We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the formation of complex designed networks from a sparse array of nanostructures, suggesting a number of potential applications in fabrication, of nanodevices, nanopatterning, and fluid-flow investigations.