期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 220, 期 -, 页码 154-161出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2015.05.043
关键词
SAW; NO2; SnO2; Sensor; Mechanism; Oscillator
A new method has been devised for obtaining fast NO2 gas sensing characteristics by using detuned SnO2/SAW sensor oscillator. The deposited SnO2 thin films were polycrystalline showing XRD reflections corresponding to (1 0 1) and (2 1 1) planes of rutile structure. The frequency of the sensor remained tuned for SnO2 layer of small thickness (<90 nm), and sensing response was moderate (< 140 kHz) with relatively slow response time and recovery time. However with increase in thickness (>= 90 nm), the frequency of SAW sensor detuned resulting in enhanced sensing response (>= 16MHz) along with fast response time and recovery time. Independent experiments confirmed the change in elasticity of the sensing layer as the dominant sensing mechanism for SnO2/SAW sensor towards NO2 gas. (c) 2015 Elsevier B.V. All rights reserved.
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