Scalable Assembly Method of Vertically-Suspended and Stretched Carbon Nanotube Network Devices for Nanoscale Electro-Mechanical Sensing Components

For the first time, vertically suspended and stretched carbon nanotube network junctions were fabricated in large quantity via the directed assembly strategy using only conventional microfabrication facilities. In this process, surface molecular patterns on the side-wall of the Al structures were utilized to guide the assembly and alignment of carbon nanotubes in the solution. We also performed extensive experimental (electrical and mechanical) analysis and theoretical simulation about the vertically suspended single-walled carbon nanotube network junctions. The junctions exhibited semiconductor-like conductance behavior. Furthermore, we demonstrated gas sensing and electromechanical sensing using these devices.