Overview on low temperature co-fired ceramic sensors

Low temperature co-fired ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to printed circuit boards (PCB) and classical thick-film technology, and it has found the application in the fabrication of multilayer ceramic boards for electronic devices. Fast and wide development of this technology permitted the fabrication of 3D mechanical structures and integration with various different processes. LTCC has found application in the manufacturing of various microelectronic devices. This paper presents an overview on LTCC technology and gives a detailed summary on physical quantity sensors fabricated using LTCC technique. (C) 2015 Elsevier B.V. All rights reserved.