期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 231, 期 -, 页码 35-43出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2014.09.015
关键词
Droplet; Sliding; Superhydrophobic; Micropillar array; MEMS; Force sensor
资金
- JSPS KAKENHI [25000010, 23310089, 24656162]
- NSK Foundation for Advancement of Mechatronics
- Grants-in-Aid for Scientific Research [23310089, 14J05877, 24656162, 25000010] Funding Source: KAKEN
In this paper, we proposed a 2-axis MEMS-based force sensor to directly measure the interaction forces during the sliding of a water droplet on a superhydrophobic surface with a micropillar array. In our sensor design, a 300-nm-thick silicon (Si) structure was fabricated beneath a single micrometer-sized pillar as the sensing element. Two piezoresistors were formed at the root of two opposite Si beams to detect the forces acting on the pillar surface in the normal and shear directions. The proposed sensor has a sensing resolution of less than 20 nN for both normal and shear forces. This resolution is confirmed to be sufficient to measure the forces of a droplet acting on a micropillar. The fabricated sensor was demonstrated to be able to measure the interaction forces during the sliding of a 7.5 mu L water droplet on the micropillar array. (C) 2014 Elsevier B.V. All rights reserved.
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