期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 232, 期 -, 页码 214-222出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2015.06.004
关键词
Micro-electro-mechanical systems; Two-in-one flexible micro sensors; Coin cell; In-situ monitoring
资金
- Ministry of Science and Technology of Republic of China [MOST 99-2632-E-155-001-MY3, 102-2221-E-155-033-MY3, 103-2622-E-155-018-CC2, 104-2622-E-155-004]
In this study, a novel integrated two-in-one flexible micro sensors are fabricated using the micro-electromechanical systems (MEMS) process for in-situ monitoring of temperature and voltage in a coin cell. Temperatures fluctuate in a coin cell, as evidenced by the inner temperature changing more rapidly than the outer one. Additionally, monitoring the inner temperature is faster than the outer one. Charging and discharging causes non-uniform distributions of the inner voltage. (C) 2015 Elsevier B.V. All rights reserved.
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