期刊
SENSORS
卷 15, 期 8, 页码 18153-18166出版社
MDPI
DOI: 10.3390/s150818153
关键词
metal organic frameworks (MOFs); thin films; porous materials; interdigitated electrodes (IDEs); gas sensor test setup; humidity sensors; capacitive sensors; volatile organic compounds (VOCs)
资金
- Advanced Membranes and Porous Materials Center (AMPMC) within Stimuli Responsive Materials thrust [FCC/1/1972-05-01]
A prototypical metal-organic framework (MOF), a 2D periodic porous structure based on the assembly of copper ions and benzene dicarboxylate (bdc) ligands (Cu(bdc)xH(2)O), was grown successfully as a thin film on interdigitated electrodes (IDEs). IDEs have been used for achieving planar CMOS-compatible low-cost capacitive sensing structures for the detection of humidity and volatile organic compounds (VOCs). Accordingly, the resultant IDEs coated with the Cu(bdc)xH(2)O thin film was evaluated, for the first time, as a capacitive sensor for gas sensing applications. A fully automated setup, using LabVIEW interfaces to experiment conduction and data acquisition, was developed in order to measure the associated gas sensing performance.
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