4.6 Article

Thin-film piezoelectric MEMS

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Chemistry, Multidisciplinary

Enhancement of Ferroelectric Polarization Stability by Interface Engineering

H. Lu et al.

ADVANCED MATERIALS (2012)

Article Physics, Applied

Powering pacemakers from heartbeat vibrations using linear and nonlinear energy harvesters

M. Amin Karami et al.

APPLIED PHYSICS LETTERS (2012)

Article Materials Science, Ceramics

PZT-Based Piezoelectric MEMS Technology

Gabriel L. Smith et al.

JOURNAL OF THE AMERICAN CERAMIC SOCIETY (2012)

Article Physics, Applied

Ultra-wide bandwidth piezoelectric energy harvesting

Arman Hajati et al.

APPLIED PHYSICS LETTERS (2011)

Article Computer Science, Information Systems

Design and Performance of an Optimal Inertial Power Harvester for Human-Powered

Jaeseok Yun et al.

IEEE TRANSACTIONS ON MOBILE COMPUTING (2011)

Article Acoustics

Designing Piezoelectric Films for Micro Electromechanical Systems

Susan Trolier-McKinstry et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2011)

Article Materials Science, Ceramics

Origins of Electro-Mechanical Coupling in Polycrystalline Ferroelectrics During Subcoercive Electrical Loading

Abhijit Pramanick et al.

JOURNAL OF THE AMERICAN CERAMIC SOCIETY (2011)

Article Nanoscience & Nanotechnology

Large field-induced strains in a lead-free piezoelectric material

J. X. Zhang et al.

NATURE NANOTECHNOLOGY (2011)

Article Multidisciplinary Sciences

Giant Piezoelectricity on Si for Hyperactive MEMS

S. H. Baek et al.

SCIENCE (2011)

Proceedings Paper Astronomy & Astrophysics

Adjustable grazing incidence x-ray optics: measurement of actuator influence functions and comparison with modeling

Vincenzo Cotroneo et al.

OPTICS FOR EUV, X-RAY, AND GAMMA-RAY ASTRONOMY V (2011)

Review Chemistry, Multidisciplinary

Crystalline Oxides on Silicon

James W. Reiner et al.

ADVANCED MATERIALS (2010)

Article Engineering, Electrical & Electronic

Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators

Chengjie Zuo et al.

SENSORS AND ACTUATORS A-PHYSICAL (2010)

Article Instruments & Instrumentation

Harvested power and sensitivity analysis of vibrating shoe-mounted piezoelectric cantilevers

L. Moro et al.

SMART MATERIALS AND STRUCTURES (2010)

Article Materials Science, Multidisciplinary

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

P. Muralt et al.

MRS BULLETIN (2009)

Review Materials Science, Ceramics

Recent progress in materials issues for piezoelectric MEMS

Paul Muralt

JOURNAL OF THE AMERICAN CERAMIC SOCIETY (2008)

Article Materials Science, Ceramics

Phase-field method of phase transitions/domain structures in ferroelectric thin films: A review

Long-Qing Chen

JOURNAL OF THE AMERICAN CERAMIC SOCIETY (2008)

Article Acoustics

Preparation of (001)-oriented Pb(Zr,Ti)O3 thin films and their piezoelectric applications

Eiji Fujii et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2007)

Review Physics, Applied

Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

V. Cimalla et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2007)

Article Acoustics

Consideration of impedance matching techniques for efficient piezoelectric energy harvesting

Hyeoungwoo Kim et al.

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2007)

Review Materials Science, Multidisciplinary

New materials for micro-scale sensors and actuators An engineering review

Stephen A. Wilson et al.

MATERIALS SCIENCE & ENGINEERING R-REPORTS (2007)

Article Engineering, Electrical & Electronic

Thin-film piezoelectric unimorph actuator-based deformable mirror with a transferred silicon membrane

Eui-Hyeok (EH) Yang et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2006)

Article Engineering, Electrical & Electronic

Design of MEMS PZT circular diaphragm actuators to generate large deflections

Eunki Hong et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2006)

Article Astronomy & Astrophysics

Generation-X: An X-ray observatory designed to observe first light objects

RA Windhorst et al.

NEW ASTRONOMY REVIEWS (2006)

Article Engineering, Electrical & Electronic

Optimization of inertial micropower generators for human walking motion

T von Büren et al.

IEEE SENSORS JOURNAL (2006)

Review Instruments & Instrumentation

Nanoelectromechanical systems

KL Ekinci et al.

REVIEW OF SCIENTIFIC INSTRUMENTS (2005)

Article Engineering, Electrical & Electronic

Wavelength-selective 1 x K switches using free-space optics and MEMS micromirrors:: Theory, design, and implementation

DM Marom et al.

JOURNAL OF LIGHTWAVE TECHNOLOGY (2005)

Article Materials Science, Ceramics

Current status and prospects of lead-free piezoelectric ceramics

T Takenaka et al.

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY (2005)

Article Physics, Applied

Dissipation in nanocrystalline-diamond nanomechanical resonators

AB Hutchinson et al.

APPLIED PHYSICS LETTERS (2004)

Article Multidisciplinary Sciences

Room-temperature ferroelectricity in strained SrTiO3

JH Haeni et al.

NATURE (2004)

Article Multidisciplinary Sciences

Enhancement of ferroelectricity in strained BaTiO3 thin films

KJ Choi et al.

SCIENCE (2004)

Article Multidisciplinary Sciences

Ferroelectricity in ultrathin perovskite films

DD Fong et al.

SCIENCE (2004)

Article Materials Science, Ceramics

Thin film piezoelectrics for MEMS

S Trolier-McKinstry et al.

JOURNAL OF ELECTROCERAMICS (2004)

Article Physics, Applied

Lead-zirconate-titanate-based piezoelectric micromachined switch

SJ Gross et al.

APPLIED PHYSICS LETTERS (2003)

Article Computer Science, Information Systems

A study of low level vibrations as a power source for wireless sensor nodes

S Roundy et al.

COMPUTER COMMUNICATIONS (2003)

Article Engineering, Electrical & Electronic

Beam-steering micromirrors for large optical cross-connects

VA Aksyuk et al.

JOURNAL OF LIGHTWAVE TECHNOLOGY (2003)

Review Physics, Condensed Matter

Nanostructured silicon for studying fundamental aspects of nanomechanics

RH Blick et al.

JOURNAL OF PHYSICS-CONDENSED MATTER (2002)

Article Physics, Applied

Single-crystal aluminum nitride nanomechanical resonators

AN Cleland et al.

APPLIED PHYSICS LETTERS (2001)

Article Physics, Applied

Monocrystalline silicon carbide nanoelectromechanical systems

YT Yang et al.

APPLIED PHYSICS LETTERS (2001)

Review Multidisciplinary Sciences

Nanoelectromechanical systems

HG Craighead

SCIENCE (2000)

Article Physics, Applied

Integration of Pb(Zr0.52Ti0.48)O3 epilayers with Si by domain epitaxy

AK Sharma et al.

APPLIED PHYSICS LETTERS (2000)