期刊
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
卷 30, 期 3, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0268-1242/30/3/035008
关键词
nitrides; piezoelectric constants; elastic moduli
类别
资金
- Polish National Science Center [2012/05/B/ST3/02516]
Measurements of linear elastic and piezoelectric constants of gallium nitride by bulk acoustic waves are reported. All material properties, including static dielectric constants by capacitance method and density by x-ray method, were determined, using semi-insulating ammonothermally grown w-GaN. The obtained values: c(11) = 366.9 +/- 0.4 GPa, c(12) = 135.0 +/- 0.6 GPa, c(13) = 97.5 +/- 0.2 GPa, c(33) = 398.1 +/- 0.6 GPa, c(44) = 99.1 +/- 0.2 GPa, e(15) = -0.36 +/- 0.03 C m(-2), e(31) = -0.41 +/- 0.04 C m(-2), e(33) = 0.86 +/- 0.04 C m(-2), epsilon(1) = (9.3 +/- 0.3) epsilon(0), and epsilon(3) = (10.3 +/- 0.3) epsilon(0) are proposed as the new standard, confirming only some results from the very sparse and ambiguous published data.
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