Hyperspectral cathodoluminescence

Hyperspectral cathodoluminescence (CL) is an important emerging tool in microanalysis and complements other traditional x-ray analysis techniques often associated with electron microscopes. By collecting whole CL spectra in a short acquisition time it is possible to minimise beam induced damage artefacts in the spectrum offering the opportunity, in particular cases, to quantify the emission centres associated with the peaks. In this paper we review the literature associated with CL collection optics, spectrometers, gratings, methods and strategies, and sample preparation. In addition we cover hyperspectral data collection and analysis including peak fitting techniques and calibration for quantitative CL analysis. To illustrate the application of hyperspectral CL we give examples of the quantification of trace Ti in quartz, and the identification of radiation damage in a sandstone-hosted uranium deposit.