NANOELECTROMECHANICAL SWITCHES FOR RECONFIGURABLE ANTENNAS

We report on the full-wave analyses of a frequency reconfigurable antenna integrated with metallic nanoelectromechanical system (NEMS) switches (length = 3 mu m, width = 60 nm). The NEMS switch used in this work has the same architecture with low voltage, double-arm cantilever-type metallic DC-contact microelectromechanical system (MEMS) switch recently developed in author's group. The microfabrication and characterization of the MEMS switch have also been given in this article. (C) 2009 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 64-69, 2010; Published online in Wiley InterScience (www.ittterscience.wiley.com). DOI 10.1002/mop.24833