MEMS switches controlled multi-split ring resonator as a tunable metamaterial component

Based on the multisplit-ring resonator (MSRR) with MEMS switches, a tunable metamaterial component is proposed in this paper to realize multiband applications. Numerical simulations are carried out to verify the tunable capacity of the proposed structure. The simulated results show that the resonance frequency of the metamaterial component shifts to higher frequencies when the MEMS switches are at different states, and depends strongly on the place, state and microbeam height of MEMS switches. Moreover, the large tunable range can be obtained by controlling the up state or down state of MEMS switches, while the small tunable range can be obtained by controlling microbeam height of MEMS switches. That is, such controlling ways can realize both rough and minor tunable metamaterial component. The tunable method proposed in this paper is of great practical values in designing tunable metamaterial and negative refractive index material.