期刊
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
卷 16, 期 7, 页码 1207-1214出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s00542-009-0945-8
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A novel fiber-optic localized plasma resonance (FO-LPR) sensor composed of a U-shape optical fiber was proposed and demonstrated in this study. The U-shape optical fiber was fabricated by a femtosecond laser micromachining system. The dimensions of the U-shape zone were 100 mu m in depth measured from the surface of the polymer jacket layer, 80 mu m in width in the jacket layer, 60 mu m in width in the cladding layer. The total length is 5 mm. After laser annealing treatment, the average surface roughness was 205.8 nm as determined by Atom Force Microscope (AFM). The exposed surface of the U-shape fiber was modified with self-assembled gold nanoparticles to produce the FO-LPR sensor. The response of the sensor shows that the signal increases linearly with increasing refractive index. The sensor resolution of the sensor was determined to be 1.06 x 10(-3) RIU.
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