4.5 Article Proceedings Paper

Spatial resolution and information transfer in scanning transmission electron microscopy

期刊

MICROSCOPY AND MICROANALYSIS
卷 14, 期 1, 页码 36-47

出版社

CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927608080161

关键词

ADF; STEM; resolution; information transfer; noise; defocus; thickness; detector inner angle

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The relation between image resolution and information transfer is explored. It is shown that the existence of higher frequency transfer in the image is just a necessary but not sufficient condition for the achievement of higher resolution. Adopting a two-point resolution criterion, we suggest that a 10% contrast level between two features in an image should be used as a practical definition of resolution. in the context of scanning transmission electron microscopy, it is shown that the channeling effect does not have a direct connection with image resolution because sharp channeling peaks do not move with the scanning probe. Through a quantitative comparison between experimental image and simulation, a Fourier-space approach is proposed to estimate defocus and sample thickness. The effective atom size in Z-contrast imaging depends on the annular detector's inner angle. Therefore, an optimum angle exists for the highest resolution as a trade-off between reduced atom size and reduced signal with limited information transfer due to noise.

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