期刊
MICROFLUIDICS AND NANOFLUIDICS
卷 6, 期 3, 页码 333-346出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s10404-008-0383-4
关键词
Cantilever type flow sensor; Differential pressure flow sensor; Lift force flow sensor; Micro-electro-mechanical systems; Resonating flow sensor; Thermal flow sensor
资金
- National Science Council in Taiwan [NSC 97-2221-E-020-038, NSC 97-2218-E-006-012, NSC97-2320-B-020001-MY3, NSC 96-2218-E-006-004]
Micro-electro-mechanical system (MEMS) devices integrate various mechanical elements, sensors, actuators, and electronics on a single silicon substrate in order to accomplish a multitude of different tasks in a diverse range of fields. The potential for device miniaturization made possible by MEMS micro-fabrication techniques has facilitated the development of many new applications, such as highly compact, non-invasive pressure sensors, accelerometers, gas sensors, etc. Besides their small physical footprint, such devices possess many other advantages compared to their macro-scale counterparts, including greater precision, lower power consumption, more rapid response, and the potential for low-cost batch production. One area in which MEMS technology has attracted particular attention is that of flow measurement. Broadly speaking, existing micro-flow sensors can be categorized as either thermal or non-thermal, depending upon their mode of operation. This paper commences by providing a high level overview of the MEMS field and then describes some of the fundamental thermal and non-thermal micro-flow sensors presented in the literature over the past 30 years or so.
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