期刊
MICROELECTRONICS JOURNAL
卷 40, 期 4-5, 页码 687-691出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.mejo.2008.11.066
关键词
Tungsten disulphide; Nanoparticles; Fulleren-like structures; Nanofabrication; Tribology; Solid lubricants
Crystalline tungsten disulphide nanoparticles were Successfully synthesized by the chemical vapor condensation (CVC) method. The process performed as decomposition of tungsten hexacarbonyl over sulphur vapor in inert gas flow, where WS2 nanoparticles were synthesized by direct reaction between as formed pure tungsten nanoclusters and sulphur vapor. Influence of experimental parameters on shape, size distribution, Structure and phase composition Of nanoparticles were evaluated by transmission and scanning electron microscopy and X-ray diffraction analysis. The produced nanoparticles have closely spherical shape with the mean size in the range 20-70 nm in diameter dependently of process parameters. Nested onion-like Structure of nanoparticles was observed. The mean value of interlayer distance in the (0 0 0 1) direction, is about 0.6358 +/- 0.031 nm. Due to nanodimensional size, physical properties and layered Structure tungsten disulphide nanoparticles have great potential as a solid lubricant material. (C) 2008 Elsevier Ltd. All rights reserved.
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