期刊
MICROELECTRONICS JOURNAL
卷 39, 期 9, 页码 1120-1125出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.mejo.2008.01.052
关键词
ZnO; TiO2; UV light; gas sensing; room temperature
资金
- Natural Science Foundation of China [50041024, 50271029]
- Natural Science Foundation of Hubei Province [2004ABA106]
- State Key Laboratory of Advanced Technology for Materials Synthesis and Processing (Wuhan University of Technology)
The gas-sensing properties of titanium oxide (TiO2)-doped zinc oxide (ZnO) thick film sensor specimens to typical ethanol vapor under UV light activation at room temperature have been investigated. Zinc nanoparticles were mixed with commercial TiO2 in various weight percentage (0%, 1%, 5%, and 10%) and sintered at 650 degrees C for 2h to prepare the thick film sensors. The sensors exhibit better photosensitivity and gas sensitivity to ethanol analyte. The response and recovery times are within 8s. TiO2 doping can improve the sensors stability and reproducibility. X-ray diffraction (XRD) and scanning electron microscopy (SEM) characterization of the film materials revealed that Zn2TiO4 and TiO2 phases hindered the rod- or needle-like structure growth and subsequently affected the gas sensitivity. UV absorption spectra of the sensing film material completely dispersed in ethanol solution exhibited that the red shifts were caused with the doping of a small amount of TiO2 into ZnO then blue shift was caused with higher TiO2 level. The results of the UV spectra are well consistent with the photosensitive performance. The maximum sensitivity can be achieved by doping the amount of TiO2 (5 wt%). (C) 2008 Elsevier Ltd. All rights reserved.
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