期刊
MICROELECTRONIC ENGINEERING
卷 121, 期 -, 页码 47-50出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2014.03.027
关键词
Antireflection; Black silicon; Nanofabrication; Large area; Injection moulding; Large volume production
资金
- NanoPlast project - Danish National Advanced Technology Foundation [007-2010-2]
- European Commission [NMP2-SE-2012-314345]
We present a method for injection moulding antireflective nanostructures on large areas, for high volume production. Nanostructured black silicon masters were fabricated by mask-less reactive ion etching, and electroplated with nickel. The nickel shim was antistiction coated and used in an injection moulding process, to fabricate the antireflective surfaces. The cycle-time was 35 s. The injection moulded structures had a height of 125 nm, and the visible spectrum reflectance of injection moulded black polypropylene surfaces was reduced from 4.5 +/- 0.5% to 2.5 +/- 0.5%. The gradient of the refractive index of the nanostructured surfaces was estimated from atomic force micrographs and the theoretical reflectance was calculated using the transfer matrix method and effective medium theory. The measured reflectance shows good agreement with the theory of graded index antireflective nanostructures. (C) 2014 Elsevier B.V. All rights reserved.
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