期刊
MICROELECTRONIC ENGINEERING
卷 121, 期 -, 页码 33-38出版社
ELSEVIER
DOI: 10.1016/j.mee.2014.02.027
关键词
Plasma nanotexturing; Antireflective; Biomimetic; Superhydrophobic; Superamphiphobic; Oleophobic
资金
- Plasma Nanofactory a Hellenic Excellence Research Project Aristeia-project [695]
- Desiredrop a Hellenic project Thales-project [MIS-380835]
- European Social Fund
Plasma nanotexturing, i.e. plasma etching with simultaneous roughening in the nano to micron scale, is used to create roughness on PMMA plates or glass slides coated with PMMA films. Mimicking nature, we use this roughness to create smart surfaces, with controlled optical and wetting properties. We present results that show combined antireflectivity, superhydrophobicity and superamphiphobicity for optimal plasma treatment time of only one-side of the samples (better results are expected for two-side treatment). In particular, using only 1.5 mm of plasma nanotexturing and etching of PMMA in oxygen plasma, followed by vacuum deposition of a perfluorinated self-assembled monolayer, a reduction of reflectivity by 30% (compared to its initial value), superhydrophobicity and superamphiphobicity were achieved for liquids with surface tension more than 50 mN/m. (C) 2014 Elsevier B.V. All rights reserved.
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