期刊
MICROELECTRONIC ENGINEERING
卷 111, 期 -, 页码 421-424出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2013.04.035
关键词
Bio-MEMS; Bio-molecular sensors; SiGe; DNA sensors; Blocking agents; Oxygen plasma
In this work minimizing the non-specific binding onto the sensor surface was carried out using different blocking agents to obtain a specific detection (1-125 nM). Bovine Serum Albumin (BSA) is considered. However, its serious disadvantage is that it has been shown to cause stiction of the Micro-Electra-Mechanical Systems (MEMS). In addition, it does not strongly bind to the underlying layer causing detachment that may lead to a weight calculation error, after the target DNA hybridization. To address both requirements mentioned above, we have tested different oxidation methods which are wet and dry to explore the impact of the SiGe oxide quality on the amount of attached bioreceptors and tested alternatives to BSA as blocking agent. Oxidized SGe samples were then exposed to different blocking agents, i.e. hexylamine, hydroxylamine, ethanolamine hydrochloride and 1,3-propyldiamine, as an alternative for BSA. It was found that there is no dependence of the probe immobilization on the type of the oxidation methods. Hexaylamine as a blocking agent was found to be the best blocking agent for SiGe MEMS. (C) 2013 Elsevier B.V. All rights reserved.
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