Micro-patterning of LiPON and lithium iron phosphate material deposited onto silicon nanopillars array for lithium ion solid state 3D micro-battery

The paper deals with the methodology used to form regular pattern of sputtered thin films LiPON/LiFePO4 material acting respectively as the solid electrolyte and the positive electrode of the lithium ion solid state 3D micro-battery. The micromachining of the silicon periodic nanopillars array (negative electrode of the micro-battery) is also reported. The proposed study clearly demonstrates a breakthrough technology in the field of lithium ion micro-battery as the ecologically friendly LiFePO4 material has never been evaluated as the positive electrode. (C) 2011 Elsevier B.V. All rights reserved.