4.4 Article

Transfer printing approach to all-carbon nanoelectronics

期刊

MICROELECTRONIC ENGINEERING
卷 88, 期 10, 页码 3150-3154

出版社

ELSEVIER
DOI: 10.1016/j.mee.2011.06.017

关键词

Carbon nanotubes; Thin film transistors; Flexible transparent electronics

资金

  1. Laboratory for Physical Sciences
  2. UMD-MRSEC [DMR 05-20471]

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Transfer printing methods are used to pattern and assemble monolithic carbon nanotube (CNT) thin-film transistors on large-area transparent, flexible substrates. Airbrushed CNT thin-films with sheet resistance 1 k Omega sq(-1) at 80% transparency were used as electrodes, and high quality chemical vapor deposition (CVD)-grown CNT networks were used as the semiconductor component. Transfer printing was used to pre-pattern and assemble thin film transistors on polyethylene terephthalate (PET) substrates which incorporated Al2O3/poly-methylmethacrylate (PMMA) dielectric hi-layer. CNT-based ambipolar devices exhibit field-effect mobility in range 1-33 cm(2)/V s and on/off ratio similar to 10(3), comparable to the control devices fabricated using Au as the electrode material. (C) 2011 Elsevier B.V. All rights reserved.

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