4.4 Article

Deposition of biopolymer films on micromechanical sensors

期刊

MICROELECTRONIC ENGINEERING
卷 88, 期 8, 页码 2297-2299

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ELSEVIER
DOI: 10.1016/j.mee.2011.02.093

关键词

Spray-coating; SU-8 cantilever; Biopolyrner; PLLA

资金

  1. Danish Research Council for Technology and Production (FTP) [09-066688]

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The influence of various parameters on the spray-coating of thin films of poly(L-lactide) (PLLA) was investigated. The optimized processing conditions were used for deposition of the biodegradable polymer on arrays of SU-8 microcantilevers. The resonance frequency of the cantilevers before and after spray-coating was measured which allowed the characterization of the mechanical properties of the coatings. Initial experiments on enzymatic degradation of the PLLA were performed. (C) 2011 Elsevier B.V. All rights reserved.

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