期刊
MICROELECTRONIC ENGINEERING
卷 87, 期 11, 页码 2382-2390出版社
ELSEVIER
DOI: 10.1016/j.mee.2010.04.013
关键词
Inkjet; Printed electronics; System-in-package; Process optimization
The printed interconnections for encapsulated electronic packages using nanoparticle metal inks and polymer dielectrics have been demonstrated. The printing has utilized a digital printing method, inkjet printing. The printing process has been adopted rather well, but process yield improvement required more attention to the control of individual manufacturing stages and error sources. The sources for possible errors can be roughly divided into separate groups: the substrate-ink interaction and treatment procedure related, ink jetting related, and moving stage related. In this paper, the individual stages were taken under consideration. The process performance was studied using statistical methods. The affecting factors were classified, and designed experiments were carried out to determine the most significant factors and to create a model to describe the behavior. According to the models, optimized process parameters were achieved, and implemented in practice. (C) 2010 Elsevier B.V. All rights reserved.
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