期刊
MICROELECTRONIC ENGINEERING
卷 86, 期 11, 页码 2255-2261出版社
ELSEVIER
DOI: 10.1016/j.mee.2009.04.001
关键词
Microlens; Reflow method; Micro optics integration; Microarray fluorescent detection
资金
- Genome Quebec
- Genome Canada
- National Research Council of Canada
This paper describes two enhanced resist reflow methods for the fabrication of microlens arrays and demonstrates their use for integrated biomolecular fluorescence detection on printed microarrays. A PDMS (polydimethylsiloxane) microlens array was fabricated by a double soft lithography approach using a photoresist microlens array as master mold. Additionally, by using both a careful control of the surface wettability and thermal treatments, we demonstrate the possibility to extend the resist reflow process in order to tune the diameters of microlens array over a large range by using a unique photomask pattern. We introduce an enhanced reflow on hydrophobic surfaces obtained by fluorosilane treatment and identify a threshold shrinkage temperature (T-shrinkage) of 140 degrees C, above which the diameter of microlenses can be then reduced down to 40% compared with the initial pattern on the photomask. Furthermore, on hydrophilic substrates, achieved by an accurate incomplete development of the photoresist, we demonstrate a nearly perfect linear dependency (1.4 mu m/degrees C) of microlens diameter spreading up to 70% the initial diameter inside a temperature reflow window of 110-140 degrees C. For both approaches, above a freezing temperature (T-freezing) of 170 degrees C, the microlens profile characteristics are temperature independent. By using high numerical aperture microlens array, we provide a proof of concept for the integration and enhanced light collection of the fluorescent signals collected form a microarray of fluorescent spots thus showing the potential of the concept for biophotonic integration. Crown Copyright (C) 2009 Published by Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据