期刊
MICROELECTRONIC ENGINEERING
卷 86, 期 4-6, 页码 979-983出版社
ELSEVIER
DOI: 10.1016/j.mee.2009.02.001
关键词
Roll-to-roll; Flexible display; Fabry-Perot; MEMS
A novel electrode patterning technique by using lift-off a sacrificial black ink layer on thin polymer substrate was performed on a roll-to-roll (reel-to-reel, R2R) printing system. An active-matrix display array was demonstrated by this technique with 2000 mu m display pixels with concept of MEMS (micro electro mechanical system) etalon. The resolution of this flexography lift-off system was improved to 100 mu m for pattern isolation from gravure printing. Compare to well-developed hot embossing or laser ablation for polymer substrate's patterning, R2R lift-off provides a flat and smooth surface which is a must for multilayer stacking and reliability. This system also provides a high pattern integrity, low cost, large scale, and high throughput solution for electrode patterning on flexible polymer substrate. (C) 2009 Elsevier B.V. All rights reserved.
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