期刊
METROLOGIA
卷 55, 期 4, 页码 541-557出版社
IOP PUBLISHING LTD
DOI: 10.1088/1681-7575/aaca6f
关键词
metrological actuator; high-resolution interferometry; homodyne interferometer; optical path multiplier; optical non-linearity; metrological angle sensor devices
资金
- European Community's Seventh Framework Programme, ERA-NET Plus [217257]
We present the realization and the characterization of a picometer reference actuator (PRA), a metrological instrument based on a precision linear actuator capable of 100 mu m range with subnanometer accuracy, picometer resolution, and submicroradian tip-tilt pointing control. The PRA relies on an integrated multiple reflections homodyne interferometer as a high resolution and accurate internal reference, on a multiple reflection based angle sensor for the control of the movement straightness, and on a versatile mirrors configuration to transfer the metrological traceability to an external device. As an example case we report the use of the PRA for the characterization of the non-linearities of the INRIM heterodyne interferometer dedicated to the calibration of capacitive sensors.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据